Infrared Heating Lamps in Rapid Thermal Processing (RTP) for Semiconductor Wafers

Rapid Thermal Processing (RTP) utilizes fast-response quartz halogen infrared heating lamps as the heat source to heat an entire wafer or material to a temperature range of 300–1250°C within a very short period. It features an extremely rapid heating rate, with a typical thermal processing time of less than 1–2 minutes. This process eliminates internal defects in the wafer or material and improves product performance. Because the heating filament of the halogen infrared lamp is made of industrial-grade tungsten alloy wire, its response time is less than 1 second. Using PID closed-loop control allows for exceptionally high temperature control accuracy and uniformity, and the heating can be stopped rapidly for quick cooling. RTP is used for processes such as oxidation, annealing, metal silicide formation, and Rapid Thermal Chemical Vapor Deposition (RTCVD).

Core Working Principle of RTP: A Fast, Precise, and Controllable Heating Process

Heat Source: Short Wave Infrared Heating Lamps + Custom High-Temperature Modules

The short-wave infrared radiation (1.0–1.4 μm) emitted by the infrared heating lamps penetrates the transparent quartz window and directly irradiates the wafer surface. The radiation area must cover the entire wafer size to ensure uniform heating temperature. The wafer surface absorbs the infrared energy and heats up rapidly, typically achieving heating rates of 100°C/s to 400°C/s.

Single Tube Short Wave Halogen Infrared Lamps are widely used in high-efficient industrial fast heating applications. The halogen IR lamp is made of quartz single tube. The heating filament is tungsten alloy material. We have 10mm, 11mm, 12mm, 14mm, 15mm and 19mm single quartz tube for different customers. The total length of single tube IR lamp can be up to 2.5 meter. In order to better convey and focus on the heated material all the IR radiation emitted from the IR lamp, the special gold reflector or white reflector will be coated and fixed directly on the quartz surface.

Shortwave infrared heating lamp can be designed with high heating power, the range of radiation wave is 1.0-1.4μm, it is particularly suited for fast response heating processes. This short wave infrared radiation penetrates more deeply into materials, as they can obtain infrared radiation full-efficiency within seconds. Meanwhile has the following advantages:

1. Fast response time, the heating temperature can rise and fall quickly

2. By combining with the reflection module, IR lamps can work in a small area by concentrating light or parallel irradiation

3. The lamp does not touch the heated object and can be used in a clean environment and no harmful

4. The working lamp is not disturbed by the atmosphere and external environment and can be used in a vacuum oven.

5. Inside of filaments can be designed and heat to 2200°C or higher, so the objects can be heated up to 1000°C or higher, depending on the material and size being heated.

Twin Tube Short Wave Infrared Emitter Heating Lamps are widely used in high-efficient industrial fast heating applications. The IR lamp is made of quartz double tube. The heating filament is tungsten alloy material. We have 23×11mm and 33×15mm quartz twin tube for different customers. The total length of twin tube IR lamp can be up to 6.0 meter. In order to better convey and focus on the heated material all the IR radiation emitted from the IR lamp, the special gold reflector or white reflector will be coated and fixed directly on the quartz surface.

According to the configuration of different heating filament design and ending cables, twin tube infrared lamp can be produced as the following common filament configuration. 

1: Cables can be one side connection or two sides connection

2: Different heating length designed for partial heating purpose

3: Length is up to 6 meter long and widely used in industrial heating process, such as glass cutting, plastics forming or lamination, auto painting and etc..

We are customized IR heating lamp manufacturer and we also provide one-stop service for your heating solution. Welcome to inquriy our high efficient heating infrared lamps. If you need twin tube IR lamps with other specifications, please refer the attached technical drawing and contact us for confirmation.